Shutdown mrc SNF 2008-01-08 16:52:50: Fried Resist in MRC

eenriquez at snf.stanford.edu eenriquez at snf.stanford.edu
Wed Jan 9 12:05:52 PST 2008


Chiller and pump is OK.  Installed a water flow meter.  Cooling water flow is about 0.7 gpm.
Need to find out if user used the quartz electrode cover or not when she etched her wafers.




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