Shutdown mrc SNF 2008-01-15 12:37:58: The quartz cylinder is cracked..

cbaxter at snf.stanford.edu cbaxter at snf.stanford.edu
Thu Jan 17 13:36:25 PST 2008

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installed new quartz cylinder, recommend to season the
chamber before etching a sample wafer.

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Next message: Comment mrc SNF 2008-01-22 17:14:28: Foreline, Roughing stanby pressure high, then recovers
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