From druist at snf.stanford.edu Thu Jul 3 13:32:49 2008 From: druist at snf.stanford.edu (druist at snf.stanford.edu) Date: Thu, 3 Jul 2008 13:32:49 -0700 Subject: Problem mrc SNF 2008-07-03 13:32:48: foreline reading high pressure Message-ID: system was left by previous user with rough & foreline both closed(gate valve was closed). Was in that configuration for ~1hr. Foreline thermocouple only goes down to 300 mTorr or so. Elmer took a look at the system- he will replace the TC next week. From cbaxter at snf.stanford.edu Sun Jul 6 08:56:28 2008 From: cbaxter at snf.stanford.edu (cbaxter at snf.stanford.edu) Date: Sun, 6 Jul 2008 08:56:28 -0700 Subject: Problem mrc SNF 2008-07-03 13:32:48: foreline reading high pressure Message-ID: Turned of DP and removed foreline tc and cleaned with ipa, now foreline meter reading below 60mt. From lwchang at snf.stanford.edu Wed Jul 9 15:21:55 2008 From: lwchang at snf.stanford.edu (lwchang at snf.stanford.edu) Date: Wed, 9 Jul 2008 15:21:55 -0700 Subject: Problem mrc SNF 2008-07-09 15:21:55: The wire (on top of the lid) for RF return path is broken Message-ID: From eenriquez at snf.stanford.edu Fri Jul 11 09:01:22 2008 From: eenriquez at snf.stanford.edu (eenriquez at snf.stanford.edu) Date: Fri, 11 Jul 2008 09:01:22 -0700 Subject: Problem mrc SNF 2008-07-09 15:21:55: The wire (on top of the lid) for RF return path is broken Message-ID: Repaired broken ground wire. From latta at snf.stanford.edu Fri Jul 11 15:13:14 2008 From: latta at snf.stanford.edu (latta at snf.stanford.edu) Date: Fri, 11 Jul 2008 15:13:14 -0700 Subject: Problem mrc SNF 2008-07-11 15:13:14: Roughing gauge doesn't go lower than ~300 Message-ID: I forged ahead and opened up the gate valve after a goodly amount of time and the baratron read +0.02. Not sure what is up... Also, the system power 'on' lamp is burnt out. From lwchang at snf.stanford.edu Sat Jul 12 16:19:35 2008 From: lwchang at snf.stanford.edu (lwchang at snf.stanford.edu) Date: Sat, 12 Jul 2008 16:19:35 -0700 Subject: Problem mrc SNF 2008-07-12 16:19:35: power glith! can not operate now. Message-ID: From lwchang at snf.stanford.edu Sat Jul 12 16:23:54 2008 From: lwchang at snf.stanford.edu (lwchang at snf.stanford.edu) Date: Sat, 12 Jul 2008 16:23:54 -0700 Subject: Problem mrc SNF 2008-07-12 16:23:54: can't pump dw chamber...sys is left vented... Message-ID: From haiwei at snf.stanford.edu Sun Jul 13 17:00:51 2008 From: haiwei at snf.stanford.edu (haiwei at snf.stanford.edu) Date: Sun, 13 Jul 2008 17:00:51 -0700 Subject: Problem mrc SNF 2008-07-13 17:00:50: the rough meter doesn't go down while pumping Message-ID: never reaches <150mTorr From eenriquez at snf.stanford.edu Mon Jul 14 11:21:45 2008 From: eenriquez at snf.stanford.edu (eenriquez at snf.stanford.edu) Date: Mon, 14 Jul 2008 11:21:45 -0700 Subject: Problem mrc SNF 2008-07-13 17:00:50: the rough meter doesn't go down while pumping Message-ID: Replaced defective roughing line TC gauge. From eenriquez at snf.stanford.edu Mon Jul 14 11:25:12 2008 From: eenriquez at snf.stanford.edu (eenriquez at snf.stanford.edu) Date: Mon, 14 Jul 2008 11:25:12 -0700 Subject: Problem mrc SNF 2008-07-12 16:23:54: can't pump dw chamber...sys is left vented... Message-ID: Replaced defective roughing line TC gauge. From eenriquez at snf.stanford.edu Mon Jul 14 11:26:43 2008 From: eenriquez at snf.stanford.edu (eenriquez at snf.stanford.edu) Date: Mon, 14 Jul 2008 11:26:43 -0700 Subject: Problem mrc SNF 2008-07-12 16:19:35: power glith! can not operate now. Message-ID: Someone recovered the system from the power glitch. Also replaced defective roughing line TC gauge. From eenriquez at snf.stanford.edu Mon Jul 14 11:27:18 2008 From: eenriquez at snf.stanford.edu (eenriquez at snf.stanford.edu) Date: Mon, 14 Jul 2008 11:27:18 -0700 Subject: Problem mrc SNF 2008-07-11 15:13:14: Roughing gauge doesn't go lower than ~300 Message-ID: Replaced defective roughing line TC gauge. From lwchang at snf.stanford.edu Fri Jul 18 18:09:14 2008 From: lwchang at snf.stanford.edu (lwchang at snf.stanford.edu) Date: Fri, 18 Jul 2008 18:09:14 -0700 Subject: Problem mrc SNF 2008-07-18 18:09:12: can't tune. RF reverse power=forward power Message-ID: From eenriquez at snf.stanford.edu Wed Jul 23 10:34:27 2008 From: eenriquez at snf.stanford.edu (eenriquez at snf.stanford.edu) Date: Wed, 23 Jul 2008 10:34:27 -0700 Subject: Problem mrc SNF 2008-07-18 18:09:12: can't tune. RF reverse power=forward power Message-ID: Another user ran an O2 plasma without any problems. From lwchang at snf.stanford.edu Fri Jul 25 15:09:23 2008 From: lwchang at snf.stanford.edu (lwchang at snf.stanford.edu) Date: Fri, 25 Jul 2008 15:09:23 -0700 Subject: Problem mrc SNF 2008-07-25 15:09:20: can't tune Message-ID: seems to be an intermittent problem. pervious user had the same problem too. From krivoire at snf.stanford.edu Thu Jul 31 11:47:23 2008 From: krivoire at snf.stanford.edu (krivoire at snf.stanford.edu) Date: Thu, 31 Jul 2008 11:47:23 -0700 Subject: Comment mrc SNF 2008-07-31 11:47:22: base pressure did not reach zero Message-ID: could not pump below 2 mT with gate valve open all the way From calarrudo at snf.stanford.edu Thu Jul 31 23:22:25 2008 From: calarrudo at snf.stanford.edu (calarrudo at snf.stanford.edu) Date: Thu, 31 Jul 2008 23:22:25 -0700 Subject: Problem mrc SNF 2008-07-31 23:22:25: MRC needs oil Message-ID: The MRC is not pumping below 2.0 mtorr when the gate valve is open. Please check oil and add as needed.