From latta at snf.stanford.edu Fri Mar 7 16:03:13 2008 From: latta at snf.stanford.edu (latta at snf.stanford.edu) Date: Fri, 7 Mar 2008 16:03:13 -0800 Subject: Comment mrc SNF 2008-03-07 16:03:12: System pwr lamp needs replacing Message-ID: From shanewang at snf.stanford.edu Fri Mar 14 12:35:31 2008 From: shanewang at snf.stanford.edu (shanewang at snf.stanford.edu) Date: Fri, 14 Mar 2008 12:35:31 -0700 Subject: Comment mrc SNF 2008-03-14 12:35:30: Uniformity not as good as before Message-ID: I am doing a plasma etching using Ar only. However, the uniformity is not as good as before. One quardrant wafer edge has problem for two wafers. From pganesan at snf.stanford.edu Fri Mar 14 16:04:17 2008 From: pganesan at snf.stanford.edu (pganesan at snf.stanford.edu) Date: Fri, 14 Mar 2008 16:04:17 -0700 Subject: Problem mrc SNF 2008-03-14 16:04:17: manometer isolation valve Message-ID: The manometer isolation valve doesn't seem to work. Even in the 'off' position, manometer reading goes up very high when chamber is vented. From eenriquez at snf.stanford.edu Mon Mar 17 10:15:42 2008 From: eenriquez at snf.stanford.edu (eenriquez at snf.stanford.edu) Date: Mon, 17 Mar 2008 10:15:42 -0700 Subject: Problem mrc SNF 2008-03-14 16:04:17: manometer isolation valve Message-ID: No problem found. Pumped down the manometer to 0.6 mT and then closed the isolation valve. Vented the chamber to atm. Manometer pressure remained at 0.6 mT after 10 min. From mislam at snf.stanford.edu Mon Mar 24 23:34:32 2008 From: mislam at snf.stanford.edu (mislam at snf.stanford.edu) Date: Mon, 24 Mar 2008 23:34:32 -0700 Subject: Problem mrc SNF 2008-03-24 23:34:31: Argon/F22 gas knob came loose Message-ID: From eenriquez at snf.stanford.edu Mon Mar 31 08:59:58 2008 From: eenriquez at snf.stanford.edu (eenriquez at snf.stanford.edu) Date: Mon, 31 Mar 2008 08:59:58 -0700 Subject: Problem mrc SNF 2008-03-24 23:34:31: Argon/F22 gas knob came loose Message-ID: Retightened the gas setpoint knob set screw.