From faridz at snf.stanford.edu  Wed Apr  8 11:06:05 2009
From: faridz at snf.stanford.edu (faridz at snf.stanford.edu)
Date: Wed, 8 Apr 2009 11:06:05 -0700
Subject: Problem mrc SNF 2009-04-08 11:06:05: rough too slow 
Message-ID: <mailman.385.1356282585.4282.mrc-pcs@snf.stanford.edu>

taking long time to reach 150 mtor. Notyfiy Nancy



From lwchang at snf.stanford.edu  Wed Apr  8 13:41:50 2009
From: lwchang at snf.stanford.edu (lwchang at snf.stanford.edu)
Date: Wed, 8 Apr 2009 13:41:50 -0700
Subject: Problem mrc SNF 2009-04-08 13:41:49: previous user did not turn off the CM meter
Message-ID: <mailman.386.1356282585.4282.mrc-pcs@snf.stanford.edu>




From jimkruger at snf.stanford.edu  Thu Apr  9 17:07:29 2009
From: jimkruger at snf.stanford.edu (jimkruger at snf.stanford.edu)
Date: Thu, 9 Apr 2009 17:07:29 -0700
Subject: Comment mrc SNF 2009-04-09 17:07:28: Leak-up rate high?
Message-ID: <mailman.387.1356282585.4282.mrc-pcs@snf.stanford.edu>

On 4-6-09, I was getting leak-up rates of ~ 18 mTorr / min. even after pumping a while.  This is about 10x the best I have seen.  Did not affect my O2 etching.



From cbaxter at snf.stanford.edu  Sun Apr 12 09:48:52 2009
From: cbaxter at snf.stanford.edu (cbaxter at snf.stanford.edu)
Date: Sun, 12 Apr 2009 09:48:52 -0700
Subject: Comment mrc SNF 2009-04-09 17:07:28: Leak-up rate high?
Message-ID: <mailman.388.1356282585.4282.mrc-pcs@snf.stanford.edu>

Found vacuum leak on gas line before the toggle valve.



From cbaxter at snf.stanford.edu  Sun Apr 12 09:49:07 2009
From: cbaxter at snf.stanford.edu (cbaxter at snf.stanford.edu)
Date: Sun, 12 Apr 2009 09:49:07 -0700
Subject: Problem mrc SNF 2009-04-08 13:41:49: previous user did not turn off the CM meter
Message-ID: <mailman.389.1356282585.4282.mrc-pcs@snf.stanford.edu>




From cbaxter at snf.stanford.edu  Sun Apr 12 09:50:39 2009
From: cbaxter at snf.stanford.edu (cbaxter at snf.stanford.edu)
Date: Sun, 12 Apr 2009 09:50:39 -0700
Subject: Problem mrc SNF 2009-04-08 11:06:05: rough too slow 
Message-ID: <mailman.390.1356282585.4282.mrc-pcs@snf.stanford.edu>

Found vacuum leak on gas line fitting before the toggle valve.



From lwchang at snf.stanford.edu  Mon Apr 13 15:37:34 2009
From: lwchang at snf.stanford.edu (lwchang at snf.stanford.edu)
Date: Mon, 13 Apr 2009 15:37:34 -0700
Subject: Problem mrc SNF 2009-04-13 15:37:34: broken voltage meter
Message-ID: <mailman.391.1356282585.4282.mrc-pcs@snf.stanford.edu>

with 100W forward power 3W reversed power the voltage meter reads 0
Plasma was on.



From cbaxter at snf.stanford.edu  Mon Apr 13 19:32:32 2009
From: cbaxter at snf.stanford.edu (cbaxter at snf.stanford.edu)
Date: Mon, 13 Apr 2009 19:32:32 -0700
Subject: Problem mrc SNF 2009-04-13 15:37:34: broken voltage meter
Message-ID: <mailman.392.1356282585.4282.mrc-pcs@snf.stanford.edu>

Connected signal cable that got disconnected.



From haiwei at snf.stanford.edu  Sat Apr 18 13:09:46 2009
From: haiwei at snf.stanford.edu (haiwei at snf.stanford.edu)
Date: Sat, 18 Apr 2009 13:09:46 -0700
Subject: Problem mrc SNF 2009-04-18 13:09:46: may run out of ar...
Message-ID: <mailman.393.1356282585.4282.mrc-pcs@snf.stanford.edu>

The max achievable flow rate is 2.1. 



From cbaxter at snf.stanford.edu  Wed Apr 22 18:50:28 2009
From: cbaxter at snf.stanford.edu (cbaxter at snf.stanford.edu)
Date: Wed, 22 Apr 2009 18:50:28 -0700
Subject: Problem mrc SNF 2009-04-18 13:09:46: may run out of ar...
Message-ID: <mailman.394.1356282585.4282.mrc-pcs@snf.stanford.edu>

Argon mfc is ok