Comment mrc SNF 2009-04-09 17:07:28: Leak-up rate high?

jimkruger at snf.stanford.edu jimkruger at snf.stanford.edu
Thu Apr 9 17:07:29 PDT 2009


On 4-6-09, I was getting leak-up rates of ~ 18 mTorr / min. even after pumping a while.  This is about 10x the best I have seen.  Did not affect my O2 etching.




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