Problem mrc SNF 2009-08-18 18:59:08: Leak during the etch

calarrudo at snf.stanford.edu calarrudo at snf.stanford.edu
Tue Aug 18 18:59:08 PDT 2009


The MRC has a leak during the etch process.  500A of Pt etches in 5:30, today it etched in 8:30.  These are the conditions I used for the etch, 
Argon (15.0 sccm), Pressure (12.5 mtorr), RF (100 watts), PV (660 volts)This is the standard recipe that I have used for the last 2 years.  I did a   leak-up check and the pressure climbed to 50.0 mtorr.  I didn't shut the system down but use with caution.




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