Comment mrc SNF 2009-08-21 14:12:47: MRC Test Update

emyers at snf.stanford.edu emyers at snf.stanford.edu
Fri Aug 21 14:12:47 PDT 2009


The leak rate after a 10min Ar plasma was ~12mtorr/min.  This was after cleaning resetting the front view port window.  Subsequent Pt etch rate did not recover and the lab member is still concerned about the performance of the MRC.




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