Comment mrc SNF 2009-08-25 17:29:19: MRC

calarrudo at snf.stanford.edu calarrudo at snf.stanford.edu
Tue Aug 25 17:29:20 PDT 2009


After the small leak was found and fixed in the SF6 line above the 
shutoff I etched 500A of Pt  with an Etch Time of 5:30.  The MRC is now etching correctly for my wafers.




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