Comment mrc SNF 2009-08-26 13:03:33: Ar sputter etch test

latta at snf.stanford.edu latta at snf.stanford.edu
Wed Aug 26 13:03:33 PDT 2009


Run after fix (15 sccm, 15 mT, 100W)
etch rate = 3A/min
Last test ER = 5A/min




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