Problem mrc SNF 2009-08-26 22:05:01: MRC Etch Rate Problem

[calarrudo at snf.stanford.edu]

The MRC has a problem with the Etch Rate its taking longer than 5:30    to etch wafers with 500A Pt.  Confirmed with test wafer I etched early       this evening, etched the 1st quarter of the wafer in 5:30, 2nd quaeter of same wafer under etched in 5:30.