From jasonlin at snf.stanford.edu Tue Dec 1 03:10:22 2009 From: jasonlin at snf.stanford.edu (jasonlin at snf.stanford.edu) Date: Tue, 1 Dec 2009 03:10:22 -0800 Subject: Problem mrc SNF 2009-12-01 03:10:21: Unable to strike plasma Message-ID: The plasma was not striking and reflected power was pretty high (in was 100W, reflected was ~10W, could not get it lower with the tuning knobs). Turned RF power source (white AC switch) off then on, waited 15 minutes and tried again but still no plasma. My conditions were 15sccm Ar, and pressure at 12.5 From jasonlin at snf.stanford.edu Tue Dec 1 05:49:16 2009 From: jasonlin at snf.stanford.edu (jasonlin at snf.stanford.edu) Date: Tue, 1 Dec 2009 05:49:16 -0800 Subject: Comment mrc SNF 2009-12-01 05:49:16: Striking Plasma Message-ID: Please ignore previous problem report. Went to higher pressure (~80mTorr) to strike plasma. In subsequent runs, the plasma was striking at my normal pressure again. From eenriquez at snf.stanford.edu Tue Dec 1 13:47:12 2009 From: eenriquez at snf.stanford.edu (eenriquez at snf.stanford.edu) Date: Tue, 1 Dec 2009 13:47:12 -0800 Subject: Problem mrc SNF 2009-12-01 03:10:21: Unable to strike plasma Message-ID: User was able to solve the problem. From eenriquez at snf.stanford.edu Tue Dec 1 13:47:19 2009 From: eenriquez at snf.stanford.edu (eenriquez at snf.stanford.edu) Date: Tue, 1 Dec 2009 13:47:19 -0800 Subject: Comment mrc SNF 2009-12-01 05:49:16: Striking Plasma Message-ID: Archived From jfoster at snf.stanford.edu Fri Dec 11 13:59:10 2009 From: jfoster at snf.stanford.edu (jfoster at snf.stanford.edu) Date: Fri, 11 Dec 2009 13:59:10 -0800 Subject: Comment mrc SNF 2009-12-11 13:59:09: top electrode filthy Message-ID: There is a thick purple film on the top electrode that looks like it could flake. Use Al foil.