Problem mrc SNF 2009-12-01 03:10:21: Unable to strike plasma

jasonlin at snf.stanford.edu jasonlin at snf.stanford.edu
Tue Dec 1 03:10:22 PST 2009


The plasma was not striking and reflected power was pretty high (in was 100W, reflected was ~10W, could not get it lower with the tuning knobs).  Turned RF power source (white AC switch) off then on, waited 15 minutes and tried again but still no plasma.
My conditions were 15sccm Ar, and pressure at 12.5




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