From nppatil at snf.stanford.edu Sun Feb 1 17:53:28 2009 From: nppatil at snf.stanford.edu (nppatil at snf.stanford.edu) Date: Sun, 1 Feb 2009 17:53:28 -0800 Subject: Problem mrc SNF 2009-02-01 17:53:27: Base Pressure Message-ID: Base pressure is at 20mTorr. From eenriquez at snf.stanford.edu Mon Feb 2 14:07:21 2009 From: eenriquez at snf.stanford.edu (eenriquez at snf.stanford.edu) Date: Mon, 2 Feb 2009 14:07:21 -0800 Subject: Shutdown mrc SNF 2009-02-02 14:07:20: Chamber not pumping down Message-ID: Found the diffusion pump was almost empty of oil. The DP over temperature switch was also tripped. Refilled the DP with oil and reset over temp switch. Now the DP foreline pressure is too high. Need to check the pump base pressure. Might need to change the oil or replace the pump. I just shut off the DP heater so we can troubleshoot the pump. From cbaxter at snf.stanford.edu Mon Feb 2 22:17:03 2009 From: cbaxter at snf.stanford.edu (cbaxter at snf.stanford.edu) Date: Mon, 2 Feb 2009 22:17:03 -0800 Subject: Comment mrc SNF 2009-02-02 22:17:02: Base pressure Message-ID: I checked the pump package with a external vacuum gauge and it pumped down to base at less than 10mt. I can rough down the chamber to 20mt w/out the dp pump. I checked the oil on the dp pump and it was black, I drained the oil and pour fresh dp oil. Heat up dp pump and was able to pump chamber down to 0mt, opened 02 gas at 10sccm flow and pressure rise to 35mt with dp gate wide open, still a problem with the dp pump. cooling down dp pump and need to continue to troubleshoot. From cbaxter at snf.stanford.edu Mon Feb 2 22:36:06 2009 From: cbaxter at snf.stanford.edu (cbaxter at snf.stanford.edu) Date: Mon, 2 Feb 2009 22:36:06 -0800 Subject: Shutdown mrc SNF 2009-02-02 14:07:20: Chamber not pumping down Message-ID: Added more dp oil and was able to control pressure with 10sccm of o2 flowing. see comment. From cbaxter at snf.stanford.edu Mon Feb 2 22:36:12 2009 From: cbaxter at snf.stanford.edu (cbaxter at snf.stanford.edu) Date: Mon, 2 Feb 2009 22:36:12 -0800 Subject: Problem mrc SNF 2009-02-01 17:53:27: Base Pressure Message-ID: From laurahughes at snf.stanford.edu Wed Feb 4 10:26:52 2009 From: laurahughes at snf.stanford.edu (laurahughes at snf.stanford.edu) Date: Wed, 4 Feb 2009 10:26:52 -0800 Subject: Shutdown mrc SNF 2009-02-04 10:26:51: Diffusion Pump not working Message-ID: When the gate is open all the way, the pressure inside the chamber stabilizes to 0 mTorr. However, when the gas valves are opened, even with the gate wide open, the pressure rises. For 15sccm of F23 and 2 sccm of O2, the pressure stabilized to 100-105 mTorr with the gate wide open, and for 10 sccm of O2, the pressure was ~30 mTorr with the gate open. From eenriquez at snf.stanford.edu Thu Feb 5 14:47:07 2009 From: eenriquez at snf.stanford.edu (eenriquez at snf.stanford.edu) Date: Thu, 5 Feb 2009 14:47:07 -0800 Subject: Comment mrc SNF 2009-02-05 14:47:06: Update Message-ID: Rebuilding the diffusion pump. System should be ready by 3 pm tomorrow. From eenriquez at snf.stanford.edu Fri Feb 6 15:01:10 2009 From: eenriquez at snf.stanford.edu (eenriquez at snf.stanford.edu) Date: Fri, 6 Feb 2009 15:01:10 -0800 Subject: Comment mrc SNF 2009-02-06 15:01:10: Update Message-ID: Had a problem with obtaining the correct oil. Problem has been resolved. John will continue with the diffusion pump work. From eenriquez at snf.stanford.edu Fri Feb 6 15:01:20 2009 From: eenriquez at snf.stanford.edu (eenriquez at snf.stanford.edu) Date: Fri, 6 Feb 2009 15:01:20 -0800 Subject: Comment mrc SNF 2009-02-05 14:47:06: Update Message-ID: Archived From cbaxter at snf.stanford.edu Sat Feb 7 00:11:00 2009 From: cbaxter at snf.stanford.edu (cbaxter at snf.stanford.edu) Date: Sat, 7 Feb 2009 00:11:00 -0800 Subject: Shutdown mrc SNF 2009-02-04 10:26:51: Diffusion Pump not working Message-ID: John, Eric and I installed newly cleaned dp pump. The foreline pressure is 10mt after the dp heat up to temp, opened up dp gate valve and flowed 20sccm of o2, pressure rise is back to normal at 1.2mt. Run 20 mins of Ar plasma w/out problem. From shott at snf.stanford.edu Sat Feb 7 08:18:26 2009 From: shott at snf.stanford.edu (shott at snf.stanford.edu) Date: Sat, 7 Feb 2009 08:18:26 -0800 Subject: Comment mrc SNF 2009-02-02 22:17:02: Base pressure Message-ID: Pump has been thoroughly cleaned and reinstalled with a fresh 500 cc charge of Santovac 5 diffusion pump oil. We also have 2 kg of Fomblin 18/9 on order for next time. We will likely need to carefully clean again when changing between Santovac (PPE) and Fomblin (PFPE). Thanks, John From shott at snf.stanford.edu Sat Feb 7 08:18:33 2009 From: shott at snf.stanford.edu (shott at snf.stanford.edu) Date: Sat, 7 Feb 2009 08:18:33 -0800 Subject: Comment mrc SNF 2009-02-06 15:01:10: Update Message-ID: Pump has been thoroughly cleaned and reinstalled with a fresh 500 cc charge of Santovac 5 diffusion pump oil. We also have 2 kg of Fomblin 18/9 on order for next time. We will likely need to carefully clean again when changing between Santovac (PPE) and Fomblin (PFPE). Thanks, John