Shutdown mrc SNF 2009-02-02 14:07:20: Chamber not pumping down

eenriquez at eenriquez at
Mon Feb 2 14:07:21 PST 2009

Found the diffusion pump was almost empty of oil.  The DP over temperature switch was also tripped.
Refilled the DP with oil and reset over temp switch.
Now the DP foreline pressure is too high.  Need to check the pump base pressure.  Might need to change the oil or replace the pump. 
I just shut off the DP heater so we can troubleshoot the pump.

More information about the mrc-pcs mailing list