Shutdown mrc SNF 2009-02-04 10:26:51: Diffusion Pump not working

laurahughes at snf.stanford.edu laurahughes at snf.stanford.edu
Wed Feb 4 10:26:52 PST 2009


When the gate is open all the way, the pressure inside the chamber stabilizes to 0 mTorr.  However, when the gas valves are opened, even with the gate wide open, the pressure rises.  For 15sccm of F23 and 2 sccm of O2, the pressure stabilized to 100-105 mTorr with the gate wide open, and for 10 sccm of O2, the pressure was ~30 mTorr with the gate open.




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