From haiwei at snf.stanford.edu Sat Jun 6 22:47:29 2009 From: haiwei at snf.stanford.edu (haiwei at snf.stanford.edu) Date: Sat, 6 Jun 2009 22:47:29 -0700 Subject: Problem mrc SNF 2009-06-06 22:47:29: the gate handler is broken Message-ID: can't close the gate anymore. From haiwei at snf.stanford.edu Sat Jun 6 23:32:54 2009 From: haiwei at snf.stanford.edu (haiwei at snf.stanford.edu) Date: Sat, 6 Jun 2009 23:32:54 -0700 Subject: Shutdown mrc SNF 2009-06-06 23:32:53: handler broken. Message-ID: In addition to the broken gate handler, chamber was opened while the 3-way switched was put in the middle position. The machine can't be used at this moment. From calarrudo at snf.stanford.edu Sat Jun 6 23:38:04 2009 From: calarrudo at snf.stanford.edu (calarrudo at snf.stanford.edu) Date: Sat, 6 Jun 2009 23:38:04 -0700 Subject: Comment mrc SNF 2009-06-06 23:38:03: MRC Message-ID: I am not sure the gate valve was closed when the previous user vented the chamber. Has the diffusion pump been compromised? The handle to the gate valve is either very loose or it comes off completely in the users hand. Recently this has happened more than once. I have critical etches to do so I need to know that the MRC is working well. From eenriquez at snf.stanford.edu Mon Jun 8 14:01:39 2009 From: eenriquez at snf.stanford.edu (eenriquez at snf.stanford.edu) Date: Mon, 8 Jun 2009 14:01:39 -0700 Subject: Comment mrc SNF 2009-06-08 14:01:38: Update handler broken Message-ID: The gate valve lead screw unscrewed too far and was pushed into the valve body. Took the valve apart and now in the process of rebuilding it. From eenriquez at snf.stanford.edu Tue Jun 9 14:39:13 2009 From: eenriquez at snf.stanford.edu (eenriquez at snf.stanford.edu) Date: Tue, 9 Jun 2009 14:39:13 -0700 Subject: Comment mrc SNF 2009-06-09 14:39:12: Update Message-ID: Broken gate valve shaft retainer ring. Machine shop is fabricating the part. From eenriquez at snf.stanford.edu Wed Jun 10 18:22:53 2009 From: eenriquez at snf.stanford.edu (eenriquez at snf.stanford.edu) Date: Wed, 10 Jun 2009 18:22:53 -0700 Subject: Shutdown mrc SNF 2009-06-06 23:32:53: handler broken. Message-ID: Rebuilt the gate valve. Vented and pumped the chamber. Ran an O2 plasma with no problems From eenriquez at snf.stanford.edu Wed Jun 10 18:23:04 2009 From: eenriquez at snf.stanford.edu (eenriquez at snf.stanford.edu) Date: Wed, 10 Jun 2009 18:23:04 -0700 Subject: Problem mrc SNF 2009-06-06 22:47:29: the gate handler is broken Message-ID: Rebuilt the gate valve. Vented and pumped the chamber. Ran an O2 plasma with no problems From eenriquez at snf.stanford.edu Wed Jun 10 18:23:09 2009 From: eenriquez at snf.stanford.edu (eenriquez at snf.stanford.edu) Date: Wed, 10 Jun 2009 18:23:09 -0700 Subject: Comment mrc SNF 2009-06-06 23:38:03: MRC Message-ID: Rebuilt the gate valve. Vented and pumped the chamber. Ran an O2 plasma with no problems From eenriquez at snf.stanford.edu Wed Jun 10 18:23:19 2009 From: eenriquez at snf.stanford.edu (eenriquez at snf.stanford.edu) Date: Wed, 10 Jun 2009 18:23:19 -0700 Subject: Comment mrc SNF 2009-05-28 10:18:11: oil Message-ID: Archived From eenriquez at snf.stanford.edu Wed Jun 10 18:23:26 2009 From: eenriquez at snf.stanford.edu (eenriquez at snf.stanford.edu) Date: Wed, 10 Jun 2009 18:23:26 -0700 Subject: Comment mrc SNF 2009-06-08 14:01:38: Update handler broken Message-ID: Archived From eenriquez at snf.stanford.edu Wed Jun 10 18:23:35 2009 From: eenriquez at snf.stanford.edu (eenriquez at snf.stanford.edu) Date: Wed, 10 Jun 2009 18:23:35 -0700 Subject: Comment mrc SNF 2009-06-09 14:39:12: Update Message-ID: Archived