Comment mrc SNF 2009-06-06 23:38:03: MRC
calarrudo at snf.stanford.edu
calarrudo at snf.stanford.edu
Sat Jun 6 23:38:04 PDT 2009
I am not sure the gate valve was closed when the previous user vented the chamber. Has the diffusion pump been compromised? The handle to the gate valve is either very loose or it comes off completely in the users hand. Recently this has happened more than once. I have critical etches to do so I need to know that the MRC is working well.
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