Problem mrc SNF 2009-06-06 22:47:29: the gate handler is broken

eenriquez at snf.stanford.edu eenriquez at snf.stanford.edu
Wed Jun 10 18:23:04 PDT 2009


Rebuilt the gate valve.  Vented and pumped the chamber.  Ran an O2 plasma with no problems




More information about the mrc-pcs mailing list