Problem mrc SNF 2009-06-06 22:47:29: the gate handler is broken
eenriquez at snf.stanford.edu
eenriquez at snf.stanford.edu
Wed Jun 10 18:23:04 PDT 2009
Rebuilt the gate valve. Vented and pumped the chamber. Ran an O2 plasma with no problems
More information about the mrc-pcs
mailing list