From bilee at snf.stanford.edu Wed May 13 06:16:05 2009 From: bilee at snf.stanford.edu (bilee at snf.stanford.edu) Date: Wed, 13 May 2009 06:16:05 -0700 Subject: Problem mrc SNF 2009-05-13 06:16:05: chamber got peeling Message-ID: Inside the chamber, peeling caused by thick deposition (from the previous uses). tried to wipe out but too many particles. From cbaxter at snf.stanford.edu Wed May 13 16:59:14 2009 From: cbaxter at snf.stanford.edu (cbaxter at snf.stanford.edu) Date: Wed, 13 May 2009 16:59:14 -0700 Subject: Problem mrc SNF 2009-05-13 06:16:05: chamber got peeling Message-ID: Cleaned chamber and wiped down with water and ipa. From calarrudo at snf.stanford.edu Thu May 14 21:09:17 2009 From: calarrudo at snf.stanford.edu (calarrudo at snf.stanford.edu) Date: Thu, 14 May 2009 21:09:17 -0700 Subject: Shutdown mrc SNF 2009-05-14 21:09:16: MRC Gate Valve Message-ID: I cannot close the Gate Valve after etching my wafer. The valve feels like it is stripped if that is possible. I left my wafer in the chamber with the monomator open. Don't want to open system with the gate vale open. From calarrudo at snf.stanford.edu Thu May 14 21:48:46 2009 From: calarrudo at snf.stanford.edu (calarrudo at snf.stanford.edu) Date: Thu, 14 May 2009 21:48:46 -0700 Subject: Problem mrc SNF 2009-05-14 21:48:46: MRC Gate Valve Message-ID: After I shutdown The tool because I was unable to close the gate valve one of the students was able to manipiulate the gate valve to close. Maintenance needs to tighten the valve. My Wafer is no lom nger in the MRC. From eenriquez at snf.stanford.edu Fri May 15 08:40:26 2009 From: eenriquez at snf.stanford.edu (eenriquez at snf.stanford.edu) Date: Fri, 15 May 2009 08:40:26 -0700 Subject: Shutdown mrc SNF 2009-05-14 21:09:16: MRC Gate Valve Message-ID: Somebody already retightened the gate valve handle set screw. Opened and closed the gate valve with no problems. From eenriquez at snf.stanford.edu Fri May 15 08:40:32 2009 From: eenriquez at snf.stanford.edu (eenriquez at snf.stanford.edu) Date: Fri, 15 May 2009 08:40:32 -0700 Subject: Problem mrc SNF 2009-05-14 21:48:46: MRC Gate Valve Message-ID: Somebody already retightened the gate valve handle set screw. Opened and closed the gate valve with no problems. From eenriquez at snf.stanford.edu Fri May 15 08:40:39 2009 From: eenriquez at snf.stanford.edu (eenriquez at snf.stanford.edu) Date: Fri, 15 May 2009 08:40:39 -0700 Subject: Comment mrc SNF 2009-03-10 09:18:11: Zeroed manometer Message-ID: Archived From bryane at snf.stanford.edu Mon May 18 10:25:18 2009 From: bryane at snf.stanford.edu (bryane at snf.stanford.edu) Date: Mon, 18 May 2009 10:25:18 -0700 Subject: Shutdown mrc SNF 2009-05-18 10:25:17: Gate valve knob came off Message-ID: When I started using the MRC this morning the Gate Valve knob felt loose. I was able to pump down the chamber, and I performed my etch. After the etch I noticed that the gate valve knob was completely loose. From mdickey at snf.stanford.edu Mon May 18 11:28:43 2009 From: mdickey at snf.stanford.edu (mdickey at snf.stanford.edu) Date: Mon, 18 May 2009 11:28:43 -0700 Subject: Shutdown mrc SNF 2009-05-18 10:25:17: Gate valve knob came off Message-ID: Tightened set screw and Jim checked it out to make sure it works ok From mdickey at snf.stanford.edu Thu May 28 10:18:12 2009 From: mdickey at snf.stanford.edu (mdickey at snf.stanford.edu) Date: Thu, 28 May 2009 10:18:12 -0700 Subject: Comment mrc SNF 2009-05-28 10:18:11: oil Message-ID: changed mechanical pump oil