Shutdown mrc SNF 2009-05-14 21:09:16: MRC Gate Valve

calarrudo at snf.stanford.edu calarrudo at snf.stanford.edu
Thu May 14 21:09:17 PDT 2009


I cannot close the Gate Valve after etching my wafer.  The valve feels like it is stripped if that is possible.   I left my wafer in the chamber with the monomator open.  Don't want to open system with the gate vale open.




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