Problem mrc SNF 2009-05-14 21:48:46: MRC Gate Valve

calarrudo at snf.stanford.edu calarrudo at snf.stanford.edu
Thu May 14 21:48:46 PDT 2009


After I shutdown The tool because I was unable to close the gate valve  one of the students was able to manipiulate the gate valve to close.  Maintenance needs to tighten the valve.  My Wafer is no lom
nger in the MRC.




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