Shutdown mrc SNF 2009-05-18 10:25:17: Gate valve knob came off

bryane at snf.stanford.edu bryane at snf.stanford.edu
Mon May 18 10:25:18 PDT 2009


When I started using the MRC this morning the Gate Valve knob felt loose.  I was able to pump down the chamber, and I performed my etch.  After the etch I noticed that the gate valve knob was completely loose.




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