From ericp at snf.stanford.edu  Tue Nov 10 20:23:14 2009
From: ericp at snf.stanford.edu (ericp at snf.stanford.edu)
Date: Tue, 10 Nov 2009 20:23:14 -0800
Subject: Problem mrc SNF 2009-11-10 20:23:13: leak rate extremely high
Message-ID: <mailman.465.1356282586.4282.mrc-pcs@snf.stanford.edu>

Measured LR at 26mT/min after 10 min pump.



From eenriquez at snf.stanford.edu  Thu Nov 12 10:54:07 2009
From: eenriquez at snf.stanford.edu (eenriquez at snf.stanford.edu)
Date: Thu, 12 Nov 2009 10:54:07 -0800
Subject: Shutdown mrc SNF 2009-11-12 10:54:06: Repairing vacuum leak
Message-ID: <mailman.466.1356282586.4282.mrc-pcs@snf.stanford.edu>

Replacing the leaky vent valve.



From eenriquez at snf.stanford.edu  Thu Nov 12 14:20:42 2009
From: eenriquez at snf.stanford.edu (eenriquez at snf.stanford.edu)
Date: Thu, 12 Nov 2009 14:20:42 -0800
Subject: Shutdown mrc SNF 2009-11-12 10:54:06: Repairing vacuum leak
Message-ID: <mailman.467.1356282586.4282.mrc-pcs@snf.stanford.edu>

Replaced the vent valve with a diaphragm valve instead of ball valve.
Now leak rate is ~ 1.2 mT/min.



From eenriquez at snf.stanford.edu  Thu Nov 12 14:20:55 2009
From: eenriquez at snf.stanford.edu (eenriquez at snf.stanford.edu)
Date: Thu, 12 Nov 2009 14:20:55 -0800
Subject: Problem mrc SNF 2009-11-10 20:23:13: leak rate extremely high
Message-ID: <mailman.468.1356282586.4282.mrc-pcs@snf.stanford.edu>

Replaced the vent valve with a diaphragm valve instead of ball valve.
Now leak rate is ~ 1.2 mT/min.



From eenriquez at snf.stanford.edu  Thu Nov 12 14:21:07 2009
From: eenriquez at snf.stanford.edu (eenriquez at snf.stanford.edu)
Date: Thu, 12 Nov 2009 14:21:07 -0800
Subject: Comment mrc SNF 2009-08-26 13:03:33: Ar sputter etch test
Message-ID: <mailman.469.1356282586.4282.mrc-pcs@snf.stanford.edu>

Archived



From jimkruger at snf.stanford.edu  Mon Nov 23 08:40:55 2009
From: jimkruger at snf.stanford.edu (jimkruger at snf.stanford.edu)
Date: Mon, 23 Nov 2009 08:40:55 -0800
Subject: Shutdown mrc SNF 2009-11-23 08:40:54: Foreline very high, diff pump cold
Message-ID: <mailman.470.1356282586.4282.mrc-pcs@snf.stanford.edu>

I found this upon arriving this morning.
jim



From eenriquez at snf.stanford.edu  Mon Nov 23 14:51:30 2009
From: eenriquez at snf.stanford.edu (eenriquez at snf.stanford.edu)
Date: Mon, 23 Nov 2009 14:51:30 -0800
Subject: Shutdown mrc SNF 2009-11-23 08:40:54: Foreline very high, diff pump cold
Message-ID: <mailman.471.1356282586.4282.mrc-pcs@snf.stanford.edu>

Replaced the foreline TC gauge, reset the diff pump thermal switch and added oil to the diff pump.  Ran Argon plasma for 5 minutes.