From latta at snf.stanford.edu Fri Oct 2 14:45:33 2009 From: latta at snf.stanford.edu (latta at snf.stanford.edu) Date: Fri, 2 Oct 2009 14:45:33 -0700 Subject: Problem mrc SNF 2009-10-02 14:45:32: gas inlet valve- pin needs nut. Message-ID: From shott at snf.stanford.edu Fri Oct 2 16:44:46 2009 From: shott at snf.stanford.edu (shott at snf.stanford.edu) Date: Fri, 2 Oct 2009 16:44:46 -0700 Subject: Problem mrc SNF 2009-09-16 11:26:17: Gas inlet valve needs nut..... Message-ID: Replaced screw and nut on gas inlet valve handle. This time I used a 2-56 aircraft nut so it shouldn't come loose this time. John From shott at snf.stanford.edu Fri Oct 2 16:44:55 2009 From: shott at snf.stanford.edu (shott at snf.stanford.edu) Date: Fri, 2 Oct 2009 16:44:55 -0700 Subject: Problem mrc SNF 2009-10-02 14:45:32: gas inlet valve- pin needs nut. Message-ID: Replaced screw and nut on gas inlet valve handle. This time I used a 2-56 aircraft nut so it shouldn't come loose this time. John From shott at snf.stanford.edu Fri Oct 2 16:45:50 2009 From: shott at snf.stanford.edu (shott at snf.stanford.edu) Date: Fri, 2 Oct 2009 16:45:50 -0700 Subject: Problem mrc SNF 2009-08-24 19:08:46: O2 leak? Message-ID: I think that this was resolved some time ago ... John From shott at snf.stanford.edu Fri Oct 2 16:46:17 2009 From: shott at snf.stanford.edu (shott at snf.stanford.edu) Date: Fri, 2 Oct 2009 16:46:17 -0700 Subject: Comment mrc SNF 2009-08-25 17:29:19: MRC Message-ID: Archived ... From shott at snf.stanford.edu Fri Oct 2 16:47:00 2009 From: shott at snf.stanford.edu (shott at snf.stanford.edu) Date: Fri, 2 Oct 2009 16:47:00 -0700 Subject: Comment mrc SNF 2009-09-04 18:13:45: HV connection to cold cathode gauge .... Message-ID: To archive ... From latta at snf.stanford.edu Tue Oct 6 12:59:12 2009 From: latta at snf.stanford.edu (latta at snf.stanford.edu) Date: Tue, 6 Oct 2009 12:59:12 -0700 Subject: Problem mrc SNF 2009-09-23 16:47:06: Needs a process qual Message-ID: CHF3 verified as good on other tools From eenriquez at snf.stanford.edu Thu Oct 8 14:49:36 2009 From: eenriquez at snf.stanford.edu (eenriquez at snf.stanford.edu) Date: Thu, 8 Oct 2009 14:49:36 -0700 Subject: Comment mrc SNF 2009-09-01 20:19:17: Wet cleaned chamber Message-ID: Archived From eenriquez at snf.stanford.edu Fri Oct 9 10:04:33 2009 From: eenriquez at snf.stanford.edu (eenriquez at snf.stanford.edu) Date: Fri, 9 Oct 2009 10:04:33 -0700 Subject: Problem mrc SNF 2009-09-08 12:47:08: MRC Pump down problem Message-ID: Secured the view port. From mtang at snf.stanford.edu Sun Oct 11 08:30:12 2009 From: mtang at snf.stanford.edu (mtang at snf.stanford.edu) Date: Sun, 11 Oct 2009 08:30:12 -0700 Subject: Problem mrc SNF 2009-08-26 22:05:01: MRC Etch Rate Problem Message-ID: Problem resolved - see note of 8/25/09. From ericp at snf.stanford.edu Thu Oct 15 15:12:11 2009 From: ericp at snf.stanford.edu (ericp at snf.stanford.edu) Date: Thu, 15 Oct 2009 15:12:11 -0700 Subject: Problem mrc SNF 2009-10-15 15:12:11: leak Message-ID: leakrate about 22mT/min (5 min pump). not always consistent, but always above 12, usually above 20. Selectivity in oxide etch is impacted by a factor of 1.5 to 2. From cbaxter at snf.stanford.edu Thu Oct 15 17:21:34 2009 From: cbaxter at snf.stanford.edu (cbaxter at snf.stanford.edu) Date: Thu, 15 Oct 2009 17:21:34 -0700 Subject: Shutdown mrc SNF 2009-10-15 17:21:34: Vacuum leak.. Message-ID: Hokking up the leak detector.. From cbaxter at snf.stanford.edu Thu Oct 15 19:49:39 2009 From: cbaxter at snf.stanford.edu (cbaxter at snf.stanford.edu) Date: Thu, 15 Oct 2009 19:49:39 -0700 Subject: Shutdown mrc SNF 2009-10-15 17:21:34: Vacuum leak.. Message-ID: Hooked up the he leak detector and he leak checked chamber (top and bottom) picked up a very small leak at the baratron before the shutoff valve (1/2 scale) tighten fitting and he leak checked again (good). Pumped down chamber for 10mins and ran manual leak check , l/r is 9mt per mins. From cbaxter at snf.stanford.edu Thu Oct 15 19:49:42 2009 From: cbaxter at snf.stanford.edu (cbaxter at snf.stanford.edu) Date: Thu, 15 Oct 2009 19:49:42 -0700 Subject: Problem mrc SNF 2009-10-15 15:12:11: leak Message-ID: