Problem mrc SNF 2009-10-15 15:12:11: leak

ericp at snf.stanford.edu ericp at snf.stanford.edu
Thu Oct 15 15:12:11 PDT 2009


leakrate about 22mT/min (5 min pump). 
not always consistent, but always above 12, usually above 20. 
Selectivity in oxide etch is impacted by a factor of 1.5 to 2. 




More information about the mrc-pcs mailing list