From cbaxter at snf.stanford.edu Tue Sep 1 20:19:18 2009 From: cbaxter at snf.stanford.edu (cbaxter at snf.stanford.edu) Date: Tue, 1 Sep 2009 20:19:18 -0700 Subject: Comment mrc SNF 2009-09-01 20:19:17: Wet cleaned chamber Message-ID: All User's, I wet cleaned the mrc chamber, please run a long chamber condition before processing your sample wafer. From shott at snf.stanford.edu Fri Sep 4 18:13:46 2009 From: shott at snf.stanford.edu (shott at snf.stanford.edu) Date: Fri, 4 Sep 2009 18:13:46 -0700 Subject: Comment mrc SNF 2009-09-04 18:13:45: HV connection to cold cathode gauge .... Message-ID: Jim McVittie pointed out that the high-voltage connection to the cold cathode gauge had come unsoldered and represented a potential safety hazard. Rather than tape it up, it seemed easier to resolder it. I believe that it is now properly soldered and attached to the high-voltage feedthrough. John From mcvittie at snf.stanford.edu Tue Sep 8 12:47:09 2009 From: mcvittie at snf.stanford.edu (mcvittie at snf.stanford.edu) Date: Tue, 8 Sep 2009 12:47:09 -0700 Subject: Problem mrc SNF 2009-09-08 12:47:08: MRC Pump down problem Message-ID: The window o-ring was initially leaking when we pumped down for the last time. Repositioning the window solved the problem for now. I think we should go back to having a quartz window and replace the o-ring. Jim From latta at snf.stanford.edu Wed Sep 16 11:26:17 2009 From: latta at snf.stanford.edu (latta at snf.stanford.edu) Date: Wed, 16 Sep 2009 11:26:17 -0700 Subject: Problem mrc SNF 2009-09-16 11:26:17: Gas inlet valve needs nut..... Message-ID: That cheesy little gas inlet valve needs a nut on the pin. From eenriquez at snf.stanford.edu Fri Sep 18 08:33:20 2009 From: eenriquez at snf.stanford.edu (eenriquez at snf.stanford.edu) Date: Fri, 18 Sep 2009 08:33:20 -0700 Subject: Problem mrc SNF 2009-09-18 08:33:19: CHF3 is unavailable Message-ID: The cylinder went empty. Possible line leak. The pressure dropped 300 lbs in 4 days. No ETA yet new cylinder. From calarrudo at snf.stanford.edu Fri Sep 18 20:11:44 2009 From: calarrudo at snf.stanford.edu (calarrudo at snf.stanford.edu) Date: Fri, 18 Sep 2009 20:11:44 -0700 Subject: Problem mrc SNF 2009-09-18 20:11:43: Unstable Argon Display Message-ID: Unstable display for Argon, connector partially disconnected, John Shot cleaned the contacts Argon display seems better. From calarrudo at snf.stanford.edu Fri Sep 18 20:35:06 2009 From: calarrudo at snf.stanford.edu (calarrudo at snf.stanford.edu) Date: Fri, 18 Sep 2009 20:35:06 -0700 Subject: Problem mrc SNF 2009-09-18 20:35:05: No CHF3 Message-ID: No CHF3, bottle ran out yesterday there was a leak in the line per Cesar. From eenriquez at snf.stanford.edu Mon Sep 21 12:55:54 2009 From: eenriquez at snf.stanford.edu (eenriquez at snf.stanford.edu) Date: Mon, 21 Sep 2009 12:55:54 -0700 Subject: Comment mrc SNF 2009-09-21 12:55:53: CHF3 update Message-ID: Gas cylinder will here on Friday, 9/25 From eenriquez at snf.stanford.edu Wed Sep 23 16:45:13 2009 From: eenriquez at snf.stanford.edu (eenriquez at snf.stanford.edu) Date: Wed, 23 Sep 2009 16:45:13 -0700 Subject: Problem mrc SNF 2009-09-18 20:35:05: No CHF3 Message-ID: Installed new CHF3 gas cylinder. Flow 20 sccm of CHF3 for 10 minutes with no problems. From eenriquez at snf.stanford.edu Wed Sep 23 16:45:26 2009 From: eenriquez at snf.stanford.edu (eenriquez at snf.stanford.edu) Date: Wed, 23 Sep 2009 16:45:26 -0700 Subject: Comment mrc SNF 2009-09-21 12:55:53: CHF3 update Message-ID: Archived From eenriquez at snf.stanford.edu Wed Sep 23 16:46:24 2009 From: eenriquez at snf.stanford.edu (eenriquez at snf.stanford.edu) Date: Wed, 23 Sep 2009 16:46:24 -0700 Subject: Problem mrc SNF 2009-09-18 08:33:19: CHF3 is unavailable Message-ID: Archived From eenriquez at snf.stanford.edu Wed Sep 23 16:46:45 2009 From: eenriquez at snf.stanford.edu (eenriquez at snf.stanford.edu) Date: Wed, 23 Sep 2009 16:46:45 -0700 Subject: Problem mrc SNF 2009-09-18 20:11:43: Unstable Argon Display Message-ID: Problem fixed. From eenriquez at snf.stanford.edu Wed Sep 23 16:47:06 2009 From: eenriquez at snf.stanford.edu (eenriquez at snf.stanford.edu) Date: Wed, 23 Sep 2009 16:47:06 -0700 Subject: Problem mrc SNF 2009-09-23 16:47:06: Needs a process qual Message-ID: We are using a new CHF3 vendor. Need to run a qual to verify the etch rates.