Problem mrc SNF 2009-09-18 20:35:05: No CHF3

eenriquez at snf.stanford.edu eenriquez at snf.stanford.edu
Wed Sep 23 16:45:13 PDT 2009

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Installed new CHF3 gas cylinder.  Flow 20 sccm of CHF3 for 10 minutes with no problems.

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