From eenriquez at snf.stanford.edu Mon Aug 2 07:58:42 2010 From: eenriquez at snf.stanford.edu (eenriquez at snf.stanford.edu) Date: Mon, 2 Aug 2010 07:58:42 -0700 Subject: Comment mrc SNF 2010-07-29 09:19:43: Tested OK after power outtage Message-ID: Archived From eenriquez at snf.stanford.edu Mon Aug 16 11:29:10 2010 From: eenriquez at snf.stanford.edu (eenriquez at snf.stanford.edu) Date: Mon, 16 Aug 2010 11:29:10 -0700 Subject: Shutdown mrc SNF 2010-08-16 11:29:10: Diffusion pump needs to heat up Message-ID: From eenriquez at snf.stanford.edu Mon Aug 16 14:55:06 2010 From: eenriquez at snf.stanford.edu (eenriquez at snf.stanford.edu) Date: Mon, 16 Aug 2010 14:55:06 -0700 Subject: Shutdown mrc SNF 2010-08-16 11:29:10: Diffusion pump needs to heat up Message-ID: Turned the diffusion heater on. After 1 hr, ran Ar plasma for 30 min. From eenriquez at snf.stanford.edu Mon Aug 23 12:40:53 2010 From: eenriquez at snf.stanford.edu (eenriquez at snf.stanford.edu) Date: Mon, 23 Aug 2010 12:40:53 -0700 Subject: Comment mrc SNF 2010-08-23 12:40:53: Completed monthly PM Message-ID: Added diffusion pump oil, zeroed manometer and MFC controllers. From calarrudo at snf.stanford.edu Mon Aug 23 17:44:58 2010 From: calarrudo at snf.stanford.edu (calarrudo at snf.stanford.edu) Date: Mon, 23 Aug 2010 17:44:58 -0700 Subject: Problem mrc SNF 2010-08-23 17:44:57: MRC F23 Line Message-ID: Tonight I tried to bleed the F23 and Argon lines. The Argon line when fully open and bleed read (0.00) as it should. the F23 line would not go below (+0.04) when fully open for thirty minutes. This is a problem for my Pt etches as F23 degrades my devices. I notified John Shott of the problem, he had no maintenance support for tonight. I need to run Pt etch tomorrow night so can this problem be resolved by tomorrow? From eenriquez at snf.stanford.edu Tue Aug 24 08:59:21 2010 From: eenriquez at snf.stanford.edu (eenriquez at snf.stanford.edu) Date: Tue, 24 Aug 2010 08:59:21 -0700 Subject: Problem mrc SNF 2010-08-23 17:44:57: MRC F23 Line Message-ID: Pumped down the F23 gas line and zeroed the MFC controller. From maxms at snf.stanford.edu Wed Aug 25 08:00:38 2010 From: maxms at snf.stanford.edu (maxms at snf.stanford.edu) Date: Wed, 25 Aug 2010 08:00:38 -0700 Subject: Comment mrc SNF 2010-08-25 08:00:37: pressure Message-ID: The pressure takes a long, long time to stabilize after starting to flow gas - orders of magnitude longer than is used to be a week ago. Even with foreline pump open for a while, cannot reach near 0 pressure in chamber. From maxms at snf.stanford.edu Wed Aug 25 08:08:17 2010 From: maxms at snf.stanford.edu (maxms at snf.stanford.edu) Date: Wed, 25 Aug 2010 08:08:17 -0700 Subject: Problem mrc SNF 2010-08-25 08:08:17: pressure Message-ID: The pressure takes a long, long time to stabilize after starting to flow gas - orders of magnitude longer than is used to be a week ago. Even with foreline pump open for a while, cannot reach near 0 pressure in chamber. From faridz at snf.stanford.edu Wed Aug 25 09:29:29 2010 From: faridz at snf.stanford.edu (faridz at snf.stanford.edu) Date: Wed, 25 Aug 2010 09:29:29 -0700 Subject: Problem mrc SNF 2010-08-25 09:29:29: Presure Problem Message-ID: From faridz at snf.stanford.edu Wed Aug 25 12:43:56 2010 From: faridz at snf.stanford.edu (faridz at snf.stanford.edu) Date: Wed, 25 Aug 2010 12:43:56 -0700 Subject: Comment mrc SNF 2010-08-25 12:43:55: Presure Problem resolved Message-ID: Thanks to Elmer, Tool is fix and working properly. I ran 6 wafers without any issues. From latta at snf.stanford.edu Wed Aug 25 12:51:21 2010 From: latta at snf.stanford.edu (latta at snf.stanford.edu) Date: Wed, 25 Aug 2010 12:51:21 -0700 Subject: Comment mrc SNF 2010-08-25 08:00:37: pressure Message-ID: diff pump tripped off and was cold. Elmer turned back on and tested. From latta at snf.stanford.edu Wed Aug 25 12:51:33 2010 From: latta at snf.stanford.edu (latta at snf.stanford.edu) Date: Wed, 25 Aug 2010 12:51:33 -0700 Subject: Problem mrc SNF 2010-08-25 08:08:17: pressure Message-ID: diff pump tripped off and was cold. Elmer turned back on and tested. From latta at snf.stanford.edu Wed Aug 25 12:51:42 2010 From: latta at snf.stanford.edu (latta at snf.stanford.edu) Date: Wed, 25 Aug 2010 12:51:42 -0700 Subject: Problem mrc SNF 2010-08-25 09:29:29: Presure Problem Message-ID: From eenriquez at snf.stanford.edu Wed Aug 25 18:42:11 2010 From: eenriquez at snf.stanford.edu (eenriquez at snf.stanford.edu) Date: Wed, 25 Aug 2010 18:42:11 -0700 Subject: Comment mrc SNF 2010-08-25 12:43:55: Presure Problem resolved Message-ID: Archived