From eenriquez at snf.stanford.edu Mon Jan 4 15:04:02 2010 From: eenriquez at snf.stanford.edu (eenriquez at snf.stanford.edu) Date: Mon, 4 Jan 2010 15:04:02 -0800 Subject: Comment mrc SNF 2010-01-04 15:04:01: Test OK Message-ID: Cleaned the top electrode and ran a recipe with no problems From eenriquez at snf.stanford.edu Tue Jan 5 09:59:13 2010 From: eenriquez at snf.stanford.edu (eenriquez at snf.stanford.edu) Date: Tue, 5 Jan 2010 09:59:13 -0800 Subject: Comment mrc SNF 2010-01-05 09:59:13: Leak rate test Message-ID: Chamber leak rate = 2 mT/min. From mferrier at snf.stanford.edu Wed Jan 13 16:48:17 2010 From: mferrier at snf.stanford.edu (mferrier at snf.stanford.edu) Date: Wed, 13 Jan 2010 16:48:17 -0800 Subject: Problem mrc SNF 2010-01-13 16:48:16: CF3 MFC very temporamental Message-ID: would indicate 0 whereas gaz was flowing and then suddenly go back to normal Red light 'deviation' went on a few times. MFC for O2 has similar pb but with less intensity From eenriquez at snf.stanford.edu Thu Jan 14 10:23:37 2010 From: eenriquez at snf.stanford.edu (eenriquez at snf.stanford.edu) Date: Thu, 14 Jan 2010 10:23:37 -0800 Subject: Problem mrc SNF 2010-01-13 16:48:16: CF3 MFC very temporamental Message-ID: No problem found. Ran CHF3 and O2 recipe for 10 minutes without any problems. Both gas flows were very stable. From kcbalram at snf.stanford.edu Sat Jan 16 15:44:19 2010 From: kcbalram at snf.stanford.edu (kcbalram at snf.stanford.edu) Date: Sat, 16 Jan 2010 15:44:19 -0800 Subject: Problem mrc SNF 2010-01-16 15:44:18: Base Pressure not zero Message-ID: Even with the gate valve fully open and all the gas lines closed, the base pressure reads ~ 6 mT instead of close to zero Krishna From eenriquez at snf.stanford.edu Tue Jan 19 11:45:58 2010 From: eenriquez at snf.stanford.edu (eenriquez at snf.stanford.edu) Date: Tue, 19 Jan 2010 11:45:58 -0800 Subject: Problem mrc SNF 2010-01-16 15:44:18: Base Pressure not zero Message-ID: Ran O2 clean for 30 min. Base pressure is 0.5 mT. Leak rate = 0.3 mT/min. From rostam at snf.stanford.edu Sun Jan 24 17:22:24 2010 From: rostam at snf.stanford.edu (rostam at snf.stanford.edu) Date: Sun, 24 Jan 2010 17:22:24 -0800 Subject: Problem mrc SNF 2010-01-24 17:22:23: foreline gauge not working Message-ID: the foreline gauge shows very high pressure From rostam at snf.stanford.edu Sun Jan 24 18:05:49 2010 From: rostam at snf.stanford.edu (rostam at snf.stanford.edu) Date: Sun, 24 Jan 2010 18:05:49 -0800 Subject: Problem mrc SNF 2010-01-24 18:05:48: foreline gauge is broken Message-ID: if you bring your finger close to the gauge, it starts moving and you can place the gauge at any number you like From eenriquez at snf.stanford.edu Tue Jan 26 14:13:39 2010 From: eenriquez at snf.stanford.edu (eenriquez at snf.stanford.edu) Date: Tue, 26 Jan 2010 14:13:39 -0800 Subject: Comment mrc SNF 2010-01-26 14:13:38: Update foreline gauge Message-ID: Foreline pressure is OK. Gauge read-out is defective. Will replace tomorrow. From mdickey at snf.stanford.edu Wed Jan 27 10:31:31 2010 From: mdickey at snf.stanford.edu (mdickey at snf.stanford.edu) Date: Wed, 27 Jan 2010 10:31:31 -0800 Subject: Problem mrc SNF 2010-01-24 18:05:48: foreline gauge is broken Message-ID: replaced t.c. and readout gauge From mdickey at snf.stanford.edu Wed Jan 27 10:31:44 2010 From: mdickey at snf.stanford.edu (mdickey at snf.stanford.edu) Date: Wed, 27 Jan 2010 10:31:44 -0800 Subject: Comment mrc SNF 2010-01-26 14:13:38: Update foreline gauge Message-ID: replaced From mdickey at snf.stanford.edu Wed Jan 27 10:32:00 2010 From: mdickey at snf.stanford.edu (mdickey at snf.stanford.edu) Date: Wed, 27 Jan 2010 10:32:00 -0800 Subject: Problem mrc SNF 2010-01-24 17:22:23: foreline gauge not working Message-ID: Is now From mdickey at snf.stanford.edu Wed Jan 27 10:36:39 2010 From: mdickey at snf.stanford.edu (mdickey at snf.stanford.edu) Date: Wed, 27 Jan 2010 10:36:39 -0800 Subject: Shutdown mrc SNF 2010-01-27 10:36:39: test Message-ID: System needs to be tested before releasing for use From latta at snf.stanford.edu Wed Jan 27 12:44:56 2010 From: latta at snf.stanford.edu (latta at snf.stanford.edu) Date: Wed, 27 Jan 2010 12:44:56 -0800 Subject: Comment mrc SNF 2009-12-11 13:59:09: top electrode filthy Message-ID: archived From eenriquez at snf.stanford.edu Wed Jan 27 14:45:36 2010 From: eenriquez at snf.stanford.edu (eenriquez at snf.stanford.edu) Date: Wed, 27 Jan 2010 14:45:36 -0800 Subject: Shutdown mrc SNF 2010-01-27 10:36:39: test Message-ID: Completed test. Wiped down the upper electrode and ran Ar plasma for 5 minutes. From eenriquez at snf.stanford.edu Wed Jan 27 14:45:53 2010 From: eenriquez at snf.stanford.edu (eenriquez at snf.stanford.edu) Date: Wed, 27 Jan 2010 14:45:53 -0800 Subject: Comment mrc SNF 2010-01-04 15:04:01: Test OK Message-ID: Archived From eenriquez at snf.stanford.edu Wed Jan 27 14:46:00 2010 From: eenriquez at snf.stanford.edu (eenriquez at snf.stanford.edu) Date: Wed, 27 Jan 2010 14:46:00 -0800 Subject: Comment mrc SNF 2010-01-05 09:59:13: Leak rate test Message-ID: Archived