From kcbalram at snf.stanford.edu Wed Jun 2 13:35:42 2010 From: kcbalram at snf.stanford.edu (kcbalram at snf.stanford.edu) Date: Wed, 2 Jun 2010 13:35:42 -0700 Subject: Problem mrc SNF 2010-06-02 13:35:42: bell jar needs to be cleaned Message-ID: Can not see the colour of the plasma clearly. From dalyx at snf.stanford.edu Fri Jun 4 12:03:06 2010 From: dalyx at snf.stanford.edu (dalyx at snf.stanford.edu) Date: Fri, 4 Jun 2010 12:03:06 -0700 Subject: Problem mrc SNF 2010-06-04 12:03:05: Etcher very dirty Message-ID: Etch works but there's a bunch of additional particulates that fall on the sample. Electrodes need to be cleaned. From cbaxter at snf.stanford.edu Sat Jun 5 02:36:15 2010 From: cbaxter at snf.stanford.edu (cbaxter at snf.stanford.edu) Date: Sat, 5 Jun 2010 02:36:15 -0700 Subject: Problem mrc SNF 2010-06-04 12:03:05: Etcher very dirty Message-ID: Cleaned bell jar From cbaxter at snf.stanford.edu Sat Jun 5 02:36:28 2010 From: cbaxter at snf.stanford.edu (cbaxter at snf.stanford.edu) Date: Sat, 5 Jun 2010 02:36:28 -0700 Subject: Problem mrc SNF 2010-06-02 13:35:42: bell jar needs to be cleaned Message-ID: cleaned bell jar From dalyx at snf.stanford.edu Sun Jun 6 22:02:30 2010 From: dalyx at snf.stanford.edu (dalyx at snf.stanford.edu) Date: Sun, 6 Jun 2010 22:02:30 -0700 Subject: Problem mrc SNF 2010-06-06 22:02:30: Ar plasma colour is not right Message-ID: Ar plasma for sputter etch looks blue in color whereas it is usually red/pink. tried running the O2 clean for 15 minutes but it did not seem to help. From cbaxter at snf.stanford.edu Sun Jun 13 21:25:11 2010 From: cbaxter at snf.stanford.edu (cbaxter at snf.stanford.edu) Date: Sun, 13 Jun 2010 21:25:11 -0700 Subject: Problem mrc SNF 2010-06-06 22:02:30: Ar plasma colour is not right Message-ID: Upper top had a leak, cleaned top oring and ran o2 plasma