Problem mrc SNF 2010-06-06 22:02:30: Ar plasma colour is not right

dalyx at snf.stanford.edu dalyx at snf.stanford.edu
Sun Jun 6 22:02:30 PDT 2010


Ar plasma for sputter etch looks blue in color whereas it is usually red/pink. tried running the O2 clean for 15 minutes but it did not seem to help. 




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