Problem mrc SNF 2010-05-25 08:47:01: oil contamination
eenriquez at snf.stanford.edu
eenriquez at snf.stanford.edu
Wed May 26 07:48:45 PDT 2010
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Shutdown mrc SNF 2010-05-25 08:50:58: Diffusion pump check
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Problem mrc SNF 2010-05-25 08:48:40: RF panel failure
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Cleaned the chamber and added oil to diffusion pump.
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Shutdown mrc SNF 2010-05-25 08:50:58: Diffusion pump check
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Problem mrc SNF 2010-05-25 08:48:40: RF panel failure
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