Problem mrc SNF 2010-10-29 08:13:25: refelctive power not stable

eenriquez at snf.stanford.edu eenriquez at snf.stanford.edu
Mon Nov 1 12:18:51 PDT 2010

Previous message: Problem mrc SNF 2010-10-30 22:03:57: pressure unstable...reflected power fluctuates
Next message: Comment mrc SNF 2010-11-01 12:22:04: Replaced view port.
Messages sorted by: [ date ] [ thread ] [ subject ] [ author ]

Added oil to diffusion pump.  Ran an Ar plasma for 15 minutes without any pressure or rf fluctuation.

Previous message: Problem mrc SNF 2010-10-30 22:03:57: pressure unstable...reflected power fluctuates
Next message: Comment mrc SNF 2010-11-01 12:22:04: Replaced view port.
Messages sorted by: [ date ] [ thread ] [ subject ] [ author ]

More information about the mrc-pcs mailing list