Shutdown mrc SNF 2010-11-01 20:18:43: unstable plasma again..reflective power won't stayed tuned

jackson at snf.stanford.edu jackson at snf.stanford.edu
Mon Nov 1 20:18:44 PDT 2010


ar   @ 40
sf6 @ 4.0
O2 @ 1.0
pressure @ 12.0-12.5
power @ 80 watts 
reflected power starts out good and tuned,  but intermittantly  shoots up and plasma cut out.  sometimes after 30 seconds, sometime 2 min.
I have check for wafer pieces for shorting to electrode and none seen.
this is the same problem written up by Farid on 10/29 and
written up again by jackson on 10/30
These comments were removed from coral reporting but was this problem fixed or looked at???




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