Comment mrc SNF 2010-11-02 16:11:48: good Ar sputter

wslee at snf.stanford.edu wslee at snf.stanford.edu
Tue Nov 2 16:11:49 PDT 2010


I ran Ar sputter with this recipe:
15sccm Ar,
20 mTorr pressure
100W power.
The rf and pressure were very stable and the etch looked good.  Can the tool be brought back to yellow so other users can run their etches?




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