Problem mrc SNF 2010-11-04 12:40:54: O2 plasma problem

lyjiao at snf.stanford.edu lyjiao at snf.stanford.edu
Thu Nov 4 12:40:54 PDT 2010


20 sccm O2, pressure 40, power 20. Could not tune the reflected power to ~0. The plasma is not stable, too. 




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