Problem mrc SNF 2010-11-09 17:53:36: small piece dropped between the stage and shield
eenriquez at snf.stanford.edu
eenriquez at snf.stanford.edu
Wed Nov 10 10:35:30 PST 2010
Removed wafer chip and cleaned the chamber. Ran an O2 plasma for 10 min without any problems.
More information about the mrc-pcs
mailing list