November 2010 Archives by date

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Starting: Mon Nov 1 12:18:47 PDT 2010
Ending: Mon Nov 22 09:21:47 PST 2010
Messages: 43

• Problem mrc SNF 2010-10-30 22:03:57: pressure unstable...reflected power fluctuates   eenriquez at snf.stanford.edu
• Problem mrc SNF 2010-10-29 08:13:25: refelctive power not stable   eenriquez at snf.stanford.edu
• Comment mrc SNF 2010-11-01 12:22:04: Replaced view port.   eenriquez at snf.stanford.edu
• Shutdown mrc SNF 2010-11-01 20:18:43: unstable plasma again..reflective power won't stayed tuned   jackson at snf.stanford.edu
• Comment mrc SNF 2010-11-02 15:24:03: Update unstable plasma   eenriquez at snf.stanford.edu
• Comment mrc SNF 2010-11-02 16:11:48: good Ar sputter   wslee at snf.stanford.edu
• Comment mrc SNF 2010-11-02 16:12:17: Ar sputter reported above was done on 11/1/2010   wslee at snf.stanford.edu
• Shutdown mrc SNF 2010-11-01 20:18:43: unstable plasma again..reflective power won't stayed tuned   latta at snf.stanford.edu
• Problem mrc SNF 2010-11-02 16:22:39: Problem from Jackson   latta at snf.stanford.edu
• Problem mrc SNF 2010-11-02 16:22:39: Problem from Jackson   latta at snf.stanford.edu
• Problem mrc SNF 2010-11-02 16:32:00: From Jackson   latta at snf.stanford.edu
• Problem mrc SNF 2010-11-04 12:00:24: unstable plasma problems   macaldwe at snf.stanford.edu
• Problem mrc SNF 2010-11-04 12:40:54: O2 plasma problem   lyjiao at snf.stanford.edu
• Problem mrc SNF 2010-11-04 12:40:54: O2 plasma problem   mcvittie at snf.stanford.edu
• Problem mrc SNF 2010-11-04 12:00:24: unstable plasma problems   mcvittie at snf.stanford.edu
• Problem mrc SNF 2010-11-02 16:32:00: From Jackson   mcvittie at snf.stanford.edu
• Problem mrc SNF 2010-11-06 09:35:08: reflected pwr / plasma   jackson at snf.stanford.edu
• Comment mrc SNF 2010-11-07 19:16:03: Update   cbaxter at snf.stanford.edu
• Comment mrc SNF 2010-11-09 00:57:44: CHF3/O2 etch rate reduced when flickering   alexneu at snf.stanford.edu
• Problem mrc SNF 2010-11-09 04:18:35: MRC Reflective Power   calarrudo at snf.stanford.edu
• Comment mrc SNF 2010-11-09 15:34:51: From Jim McVittie   latta at snf.stanford.edu
• Problem mrc SNF 2010-11-09 17:53:36: small piece dropped between the stage and shield   ahazeghi at snf.stanford.edu
• Problem mrc SNF 2010-11-09 17:53:36: small piece dropped between the stage and shield   eenriquez at snf.stanford.edu
• Comment mrc SNF 2010-11-10 11:29:48: Maintenance work   eenriquez at snf.stanford.edu
• Comment mrc SNF 2010-11-02 15:24:03: Update unstable plasma   eenriquez at snf.stanford.edu
• Comment mrc SNF 2010-11-01 12:22:04: Replaced view port.   eenriquez at snf.stanford.edu
• Comment mrc SNF 2010-11-02 16:11:48: good Ar sputter   eenriquez at snf.stanford.edu
• Problem mrc SNF 2010-11-12 23:46:12: pump off   jackson at snf.stanford.edu
• Shutdown mrc SNF 2010-11-13 00:55:52: MRC   calarrudo at snf.stanford.edu
• Comment mrc SNF 2010-11-15 10:58:47: Jim Mcvittie is working on the RF   eenriquez at snf.stanford.edu
• Comment mrc SNF 2010-11-15 14:29:39: Update pumpdown problem   eenriquez at snf.stanford.edu
• Comment mrc SNF 2010-11-16 14:48:57: Update pumpdown problem.   eenriquez at snf.stanford.edu
• Shutdown mrc SNF 2010-11-13 00:55:52: MRC   eenriquez at snf.stanford.edu
• Comment mrc SNF 2010-11-15 10:58:47: Jim Mcvittie is working on the RF   eenriquez at snf.stanford.edu
• Comment mrc SNF 2010-11-15 14:29:39: Update pumpdown problem   eenriquez at snf.stanford.edu
• Comment mrc SNF 2010-11-16 14:48:57: Update pumpdown problem.   eenriquez at snf.stanford.edu
• Problem mrc SNF 2010-11-12 23:46:12: pump off   eenriquez at snf.stanford.edu
• Comment mrc SNF 2010-11-18 14:15:49: Jim Mc modifications   eenriquez at snf.stanford.edu
• Comment mrc SNF 2010-11-07 19:16:03: Update   eenriquez at snf.stanford.edu
• Problem mrc SNF 2010-11-06 09:35:08: reflected pwr / plasma   eenriquez at snf.stanford.edu
• Problem mrc SNF 2010-11-09 04:18:35: MRC Reflective Power   eenriquez at snf.stanford.edu
• Comment mrc SNF 2010-11-09 00:57:44: CHF3/O2 etch rate reduced when flickering   eenriquez at snf.stanford.edu
• Comment mrc SNF 2010-11-22 09:21:46: Completed monthly pm   eenriquez at snf.stanford.edu

Last message date: Mon Nov 22 09:21:47 PST 2010
Archived on: Sun Dec 23 09:10:00 PST 2012

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