From kcbalram at snf.stanford.edu Tue Oct 5 19:27:29 2010 From: kcbalram at snf.stanford.edu (kcbalram at snf.stanford.edu) Date: Tue, 5 Oct 2010 19:27:29 -0700 Subject: Problem mrc SNF 2010-10-05 19:27:28: Foreline Indicator Not working Message-ID: From calarrudo at snf.stanford.edu Wed Oct 6 01:24:54 2010 From: calarrudo at snf.stanford.edu (calarrudo at snf.stanford.edu) Date: Wed, 6 Oct 2010 01:24:54 -0700 Subject: Problem mrc SNF 2010-10-06 01:24:53: Message-ID: The foreline will not drop below 2000 mTorr. this is a serious problem for my process conditions. with my pump/purge procedure I am able to normally get the foreline pressure to 10 mTorr. I am unable to process at 2000 mTorr. Earlier today I processed my wafers at 10mTorr. From eenriquez at snf.stanford.edu Wed Oct 6 08:57:37 2010 From: eenriquez at snf.stanford.edu (eenriquez at snf.stanford.edu) Date: Wed, 6 Oct 2010 08:57:37 -0700 Subject: Shutdown mrc SNF 2010-10-06 08:57:36: Need to replace foreline TC Message-ID: From eenriquez at snf.stanford.edu Wed Oct 6 09:38:38 2010 From: eenriquez at snf.stanford.edu (eenriquez at snf.stanford.edu) Date: Wed, 6 Oct 2010 09:38:38 -0700 Subject: Problem mrc SNF 2010-10-06 01:24:53: Message-ID: Replaced defective foreline TC. Please do not leave the system with the Roughing valve open. From eenriquez at snf.stanford.edu Wed Oct 6 09:39:18 2010 From: eenriquez at snf.stanford.edu (eenriquez at snf.stanford.edu) Date: Wed, 6 Oct 2010 09:39:18 -0700 Subject: Shutdown mrc SNF 2010-10-06 08:57:36: Need to replace foreline TC Message-ID: Replaced the defective foreline TC. From eenriquez at snf.stanford.edu Wed Oct 6 09:45:07 2010 From: eenriquez at snf.stanford.edu (eenriquez at snf.stanford.edu) Date: Wed, 6 Oct 2010 09:45:07 -0700 Subject: Comment mrc SNF 2010-10-06 09:45:07: DONT LEAVE the roughing valve OPEN Message-ID: Last user, DO NOT leave the system with the roughing valve open. Next time, you will be disqualified. From cbaxter at snf.stanford.edu Wed Oct 6 11:19:56 2010 From: cbaxter at snf.stanford.edu (cbaxter at snf.stanford.edu) Date: Wed, 6 Oct 2010 11:19:56 -0700 Subject: Problem mrc SNF 2010-10-05 19:27:28: Foreline Indicator Not working Message-ID: Elmer changed the foreline tc.. From haiwei at snf.stanford.edu Thu Oct 14 09:23:33 2010 From: haiwei at snf.stanford.edu (haiwei at snf.stanford.edu) Date: Thu, 14 Oct 2010 09:23:33 -0700 Subject: Shutdown mrc SNF 2010-10-14 09:23:33: no plasma Message-ID: talked to Elemer and was advised to shut the tool down. From eenriquez at snf.stanford.edu Thu Oct 14 09:56:32 2010 From: eenriquez at snf.stanford.edu (eenriquez at snf.stanford.edu) Date: Thu, 14 Oct 2010 09:56:32 -0700 Subject: Shutdown mrc SNF 2010-10-14 09:23:33: no plasma Message-ID: Found the electrode quartz plate off center. Ran Ar and O2 plasma with no problems. From kcbalram at snf.stanford.edu Thu Oct 14 18:29:17 2010 From: kcbalram at snf.stanford.edu (kcbalram at snf.stanford.edu) Date: Thu, 14 Oct 2010 18:29:17 -0700 Subject: Problem mrc SNF 2010-10-14 18:29:16: View glass needs cleaning Message-ID: Not able to see plasma clearly.... especially difficult when doing oxide etches.... From eenriquez at snf.stanford.edu Fri Oct 15 09:24:45 2010 From: eenriquez at snf.stanford.edu (eenriquez at snf.stanford.edu) Date: Fri, 15 Oct 2010 09:24:45 -0700 Subject: Problem mrc SNF 2010-10-14 18:29:16: View glass needs cleaning Message-ID: Replaced the quartz chamber liner and ran an O2 plasma for 5 min. From tanemura at snf.stanford.edu Mon Oct 25 11:59:59 2010 From: tanemura at snf.stanford.edu (tanemura at snf.stanford.edu) Date: Mon, 25 Oct 2010 11:59:59 -0700 Subject: Problem mrc SNF 2010-10-25 11:59:59: Cannot reach 10mTorr Message-ID: When pumping down the chamber and after opening the gate valve, I could not reach below 10mTorr at the capacitance manometer. From lyjiao at snf.stanford.edu Mon Oct 25 13:04:48 2010 From: lyjiao at snf.stanford.edu (lyjiao at snf.stanford.edu) Date: Mon, 25 Oct 2010 13:04:48 -0700 Subject: Problem mrc SNF 2010-10-25 13:04:47: pumping problem Message-ID: The problem is the same as the one reported by the previous user. It seems that something wrong with the diffusion pump. From eenriquez at snf.stanford.edu Mon Oct 25 14:38:21 2010 From: eenriquez at snf.stanford.edu (eenriquez at snf.stanford.edu) Date: Mon, 25 Oct 2010 14:38:21 -0700 Subject: Problem mrc SNF 2010-10-25 11:59:59: Cannot reach 10mTorr Message-ID: Reset the diffusion pump heater's thermal switch. From eenriquez at snf.stanford.edu Mon Oct 25 14:38:43 2010 From: eenriquez at snf.stanford.edu (eenriquez at snf.stanford.edu) Date: Mon, 25 Oct 2010 14:38:43 -0700 Subject: Problem mrc SNF 2010-10-25 13:04:47: pumping problem Message-ID: Reset the diffusion pump heater's thermal switch. Ran Ar plasma for 5 min. From wslee at snf.stanford.edu Mon Oct 25 16:32:38 2010 From: wslee at snf.stanford.edu (wslee at snf.stanford.edu) Date: Mon, 25 Oct 2010 16:32:38 -0700 Subject: Problem mrc SNF 2010-10-25 16:32:37: Cannot reach <5mT Message-ID: The diffusion pump is very slow and cannot reach low pressures. From yiwu at snf.stanford.edu Mon Oct 25 19:08:32 2010 From: yiwu at snf.stanford.edu (yiwu at snf.stanford.edu) Date: Mon, 25 Oct 2010 19:08:32 -0700 Subject: Comment mrc SNF 2010-10-25 19:08:32: cannot reach below 10mTorr Message-ID: Diffusion pump really slow... From eenriquez at snf.stanford.edu Tue Oct 26 10:56:34 2010 From: eenriquez at snf.stanford.edu (eenriquez at snf.stanford.edu) Date: Tue, 26 Oct 2010 10:56:34 -0700 Subject: Shutdown mrc SNF 2010-10-26 10:56:33: Defective thermal switch Message-ID: From eenriquez at snf.stanford.edu Tue Oct 26 14:20:25 2010 From: eenriquez at snf.stanford.edu (eenriquez at snf.stanford.edu) Date: Tue, 26 Oct 2010 14:20:25 -0700 Subject: Shutdown mrc SNF 2010-10-26 10:56:33: Defective thermal switch Message-ID: Replaced defective thermal switch. Ran Ar plasma for 5 min. Thanks to David Cala for picking up the replacement part. From eenriquez at snf.stanford.edu Tue Oct 26 14:20:32 2010 From: eenriquez at snf.stanford.edu (eenriquez at snf.stanford.edu) Date: Tue, 26 Oct 2010 14:20:32 -0700 Subject: Comment mrc SNF 2010-10-25 19:08:32: cannot reach below 10mTorr Message-ID: Replaced defective thermal switch. Ran Ar plasma for 5 min. From eenriquez at snf.stanford.edu Tue Oct 26 14:20:37 2010 From: eenriquez at snf.stanford.edu (eenriquez at snf.stanford.edu) Date: Tue, 26 Oct 2010 14:20:37 -0700 Subject: Problem mrc SNF 2010-10-25 16:32:37: Cannot reach <5mT Message-ID: Replaced defective thermal switch. Ran Ar plasma for 5 min. From dasgupta at snf.stanford.edu Thu Oct 28 10:39:48 2010 From: dasgupta at snf.stanford.edu (dasgupta at snf.stanford.edu) Date: Thu, 28 Oct 2010 10:39:48 -0700 Subject: Problem mrc SNF 2010-10-28 10:39:47: Could not strike Ar plasma Message-ID: tried normal process conditions (15 sccm Ar, 15 mtorr, 50-100 W forward power) could not strike plasma. Tried playing with pressure and flow rate. Reverse power was low (<5W), usually this is high if the plasma does not strike. Not sure what to do next. From eenriquez at snf.stanford.edu Thu Oct 28 14:26:41 2010 From: eenriquez at snf.stanford.edu (eenriquez at snf.stanford.edu) Date: Thu, 28 Oct 2010 14:26:41 -0700 Subject: Problem mrc SNF 2010-10-28 10:39:47: Could not strike Ar plasma Message-ID: Removed wafer chips under the electrode. Ran Ar plasma @ 15 mT for 10 minutes. From faridz at snf.stanford.edu Fri Oct 29 08:13:25 2010 From: faridz at snf.stanford.edu (faridz at snf.stanford.edu) Date: Fri, 29 Oct 2010 08:13:25 -0700 Subject: Problem mrc SNF 2010-10-29 08:13:25: refelctive power not stable Message-ID: From jackson at snf.stanford.edu Sat Oct 30 22:03:58 2010 From: jackson at snf.stanford.edu (jackson at snf.stanford.edu) Date: Sat, 30 Oct 2010 22:03:58 -0700 Subject: Problem mrc SNF 2010-10-30 22:03:57: pressure unstable...reflected power fluctuates Message-ID: