Problem mrc SNF 2010-10-06 01:24:53:

calarrudo at snf.stanford.edu calarrudo at snf.stanford.edu
Wed Oct 6 01:24:54 PDT 2010


The foreline will not drop below 2000 mTorr. this is a serious problem for my process conditions.  with my pump/purge procedure I am able to normally get the foreline pressure to 10 mTorr.  I am unable to process at 2000 mTorr.  Earlier today I processed my wafers at 10mTorr.




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