Shutdown mrc SNF 2010-10-14 09:23:33: no plasma
haiwei at snf.stanford.edu
haiwei at snf.stanford.edu
Thu Oct 14 09:23:33 PDT 2010
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Comment mrc SNF 2010-10-06 09:45:07: DONT LEAVE the roughing valve OPEN
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Shutdown mrc SNF 2010-10-14 09:23:33: no plasma
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talked to Elemer and was advised to shut the tool down.
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Comment mrc SNF 2010-10-06 09:45:07: DONT LEAVE the roughing valve OPEN
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Shutdown mrc SNF 2010-10-14 09:23:33: no plasma
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