Problem mrc SNF 2010-10-25 11:59:59: Cannot reach 10mTorr

tanemura at snf.stanford.edu tanemura at snf.stanford.edu
Mon Oct 25 11:59:59 PDT 2010


When pumping down the chamber and after opening the gate valve, I could not reach below 10mTorr at the capacitance manometer.




More information about the mrc-pcs mailing list