Problem mrc SNF 2010-10-28 10:39:47: Could not strike Ar plasma

dasgupta at snf.stanford.edu dasgupta at snf.stanford.edu
Thu Oct 28 10:39:48 PDT 2010


tried normal process conditions (15 sccm Ar, 15 mtorr, 50-100 W forward power) could not strike plasma.  Tried playing with pressure and flow rate.  Reverse power was low (<5W), usually this is high if the plasma does not strike.  Not sure what to do next.




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