Problem mrc SNF 2010-10-28 10:39:47: Could not strike Ar plasma

eenriquez at snf.stanford.edu eenriquez at snf.stanford.edu
Thu Oct 28 14:26:41 PDT 2010


Removed wafer chips under the electrode.  Ran Ar plasma @ 15 mT for 10  minutes.




More information about the mrc-pcs mailing list