Shutdown mrc SNF 2010-09-02 15:53:19: Plasma will not stay on at Startup

eenriquez at snf.stanford.edu eenriquez at snf.stanford.edu
Wed Sep 8 17:28:00 PDT 2010


Disassembled and cleaned the electrode.  Replaced electrode seals. Installed clean quartz shield.  Ran Ar plasma @ 100 W for 15 min with no problems.  Also ran at a peak rf voltage of 1000 V for 3 minutes.  
Chamber leak rate is <2 mT/min.




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