Problem mrc SNF 2010-09-12 16:05:17: unstable plasma

eenriquez at snf.stanford.edu eenriquez at snf.stanford.edu
Mon Sep 13 10:59:32 PDT 2010


Found and remove a large wafer chip underneath the electrode.  Ran at 300 W and an RF peak voltage of 1KV for 10 min with no problems.




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