From cchen86 at snf.stanford.edu Mon Apr 4 10:49:49 2011 From: cchen86 at snf.stanford.edu (cchen86 at snf.stanford.edu) Date: Mon, 4 Apr 2011 10:49:49 -0700 Subject: Problem mrc SNF 2011-04-04 10:49:48: dirty chamber and dirty glass Message-ID: The chamber is very dirty, with a lot of particles. Something is peeling off from the top of the chamber. The glass is also very dirty, which makes it hard to see the plasma. From mdickey at snf.stanford.edu Mon Apr 4 13:15:42 2011 From: mdickey at snf.stanford.edu (mdickey at snf.stanford.edu) Date: Mon, 4 Apr 2011 13:15:42 -0700 Subject: Problem mrc SNF 2011-04-04 10:49:48: dirty chamber and dirty glass Message-ID: replaced liner and cleaned chamber From eenriquez at snf.stanford.edu Mon Apr 4 14:02:08 2011 From: eenriquez at snf.stanford.edu (eenriquez at snf.stanford.edu) Date: Mon, 4 Apr 2011 14:02:08 -0700 Subject: Comment mrc SNF 2011-03-21 09:15:49: Pumped out O2 line Message-ID: Archived From eenriquez at snf.stanford.edu Mon Apr 4 14:02:19 2011 From: eenriquez at snf.stanford.edu (eenriquez at snf.stanford.edu) Date: Mon, 4 Apr 2011 14:02:19 -0700 Subject: Comment mrc SNF 2011-03-18 10:49:18: not found in proper standby conditions Message-ID: Archived From eenriquez at snf.stanford.edu Mon Apr 4 14:04:18 2011 From: eenriquez at snf.stanford.edu (eenriquez at snf.stanford.edu) Date: Mon, 4 Apr 2011 14:04:18 -0700 Subject: Comment mrc SNF 2011-03-04 14:36:05: Completed monthly PM Message-ID: Archived From bilee at snf.stanford.edu Thu Apr 7 04:54:07 2011 From: bilee at snf.stanford.edu (bilee at snf.stanford.edu) Date: Thu, 7 Apr 2011 04:54:07 -0700 Subject: Problem mrc SNF 2011-04-07 04:54:06: Electrode too dirty Message-ID: severe peeling on the electrode. particles falling off. From eenriquez at snf.stanford.edu Thu Apr 7 09:22:27 2011 From: eenriquez at snf.stanford.edu (eenriquez at snf.stanford.edu) Date: Thu, 7 Apr 2011 09:22:27 -0700 Subject: Problem mrc SNF 2011-04-07 04:54:06: Electrode too dirty Message-ID: Cleaned the chamber and electrode. We had just cleaned them 3 days ago. Ran O2 plasma for 20 minutes. From eenriquez at snf.stanford.edu Fri Apr 8 09:11:40 2011 From: eenriquez at snf.stanford.edu (eenriquez at snf.stanford.edu) Date: Fri, 8 Apr 2011 09:11:40 -0700 Subject: Comment mrc SNF 2011-03-06 14:20:23: The previous use didn't close the N2 line Message-ID: Archived From eenriquez at snf.stanford.edu Fri Apr 8 09:11:49 2011 From: eenriquez at snf.stanford.edu (eenriquez at snf.stanford.edu) Date: Fri, 8 Apr 2011 09:11:49 -0700 Subject: Comment mrc SNF 2011-03-16 17:29:10: device left roughing with n2 flowing Message-ID: Archived From wslee at snf.stanford.edu Sat Apr 16 09:18:05 2011 From: wslee at snf.stanford.edu (wslee at snf.stanford.edu) Date: Sat, 16 Apr 2011 09:18:05 -0700 Subject: Comment mrc SNF 2011-04-16 09:18:04: Stiff gate valve Message-ID: When the gate valve is almost closed, it becomes stiff. Once or twice, when I shut the gate valve, the pressure jumped to about 150 mTorr (no gases flowing). From wslee at snf.stanford.edu Thu Apr 21 16:30:00 2011 From: wslee at snf.stanford.edu (wslee at snf.stanford.edu) Date: Thu, 21 Apr 2011 16:30:00 -0700 Subject: Problem mrc SNF 2011-04-21 16:29:59: gate valve leak? Message-ID: When I open the gate valve, the pressure skyrockets up. From eenriquez at snf.stanford.edu Fri Apr 22 09:42:58 2011 From: eenriquez at snf.stanford.edu (eenriquez at snf.stanford.edu) Date: Fri, 22 Apr 2011 09:42:58 -0700 Subject: Shutdown mrc SNF 2011-04-22 09:42:58: Gate valve leak. Message-ID: Need to rebuild the gate valve. From eenriquez at snf.stanford.edu Fri Apr 22 12:41:18 2011 From: eenriquez at snf.stanford.edu (eenriquez at snf.stanford.edu) Date: Fri, 22 Apr 2011 12:41:18 -0700 Subject: Shutdown mrc SNF 2011-04-22 09:42:58: Gate valve leak. Message-ID: Replaced gate valve shaft seals. Ran 02 plasma for 15 minutes. From eenriquez at snf.stanford.edu Fri Apr 22 12:42:53 2011 From: eenriquez at snf.stanford.edu (eenriquez at snf.stanford.edu) Date: Fri, 22 Apr 2011 12:42:53 -0700 Subject: Problem mrc SNF 2011-04-21 16:29:59: gate valve leak? Message-ID: Replaced gate valve shaft seals. Ran 02 plasma for 15 minutes. From eenriquez at snf.stanford.edu Fri Apr 22 15:08:37 2011 From: eenriquez at snf.stanford.edu (eenriquez at snf.stanford.edu) Date: Fri, 22 Apr 2011 15:08:37 -0700 Subject: Comment mrc SNF 2011-04-16 09:18:04: Stiff gate valve Message-ID: Replaced gate valve shaft seals. Ran 02 plasma for 15 minutes. From kcbalram at snf.stanford.edu Fri Apr 29 00:24:50 2011 From: kcbalram at snf.stanford.edu (kcbalram at snf.stanford.edu) Date: Fri, 29 Apr 2011 00:24:50 -0700 Subject: Problem mrc SNF 2011-04-29 00:24:50: System was not left in proper standby state Message-ID: The roughing valve was open. Power supply was On Krishna From eenriquez at snf.stanford.edu Fri Apr 29 09:51:02 2011 From: eenriquez at snf.stanford.edu (eenriquez at snf.stanford.edu) Date: Fri, 29 Apr 2011 09:51:02 -0700 Subject: Problem mrc SNF 2011-04-29 00:24:50: System was not left in proper standby state Message-ID: Ran O2 plasma.