Problem mrc SNF 2011-04-07 04:54:06: Electrode too dirty

eenriquez at snf.stanford.edu eenriquez at snf.stanford.edu
Thu Apr 7 09:22:27 PDT 2011


Cleaned the chamber and electrode.  We had just cleaned them 3 days ago.  Ran O2 plasma for 20 minutes.




More information about the mrc-pcs mailing list