From kcbalram at snf.stanford.edu  Thu Feb  3 22:52:25 2011
From: kcbalram at snf.stanford.edu (kcbalram at snf.stanford.edu)
Date: Thu, 3 Feb 2011 22:52:25 -0800
Subject: Problem mrc SNF 2011-02-03 22:52:24: System not found in proper standby state
Message-ID: <mailman.673.1356282588.4282.mrc-pcs@snf.stanford.edu>

Roughing valve was open and foreline closed......



From eenriquez at snf.stanford.edu  Fri Feb  4 08:41:38 2011
From: eenriquez at snf.stanford.edu (eenriquez at snf.stanford.edu)
Date: Fri, 4 Feb 2011 08:41:38 -0800
Subject: Problem mrc SNF 2011-02-03 22:52:24: System not found in proper standby state
Message-ID: <mailman.674.1356282588.4282.mrc-pcs@snf.stanford.edu>

Ran a O2 plasma for 10 min.  System ran OK.



From faridz at snf.stanford.edu  Thu Feb 10 12:27:23 2011
From: faridz at snf.stanford.edu (faridz at snf.stanford.edu)
Date: Thu, 10 Feb 2011 12:27:23 -0800
Subject: Problem mrc SNF 2011-02-10 12:27:23: fore line presure is getting above 150mtor 
Message-ID: <mailman.675.1356282588.4282.mrc-pcs@snf.stanford.edu>




From eenriquez at snf.stanford.edu  Mon Feb 14 09:16:38 2011
From: eenriquez at snf.stanford.edu (eenriquez at snf.stanford.edu)
Date: Mon, 14 Feb 2011 09:16:38 -0800
Subject: Problem mrc SNF 2011-02-10 12:27:23: fore line presure is getting above 150mtor 
Message-ID: <mailman.676.1356282588.4282.mrc-pcs@snf.stanford.edu>

No problem found. Foreline leak back rate is normal.



From eenriquez at snf.stanford.edu  Wed Feb 16 11:04:38 2011
From: eenriquez at snf.stanford.edu (eenriquez at snf.stanford.edu)
Date: Wed, 16 Feb 2011 11:04:38 -0800
Subject: Comment mrc SNF 2011-01-19 09:41:34: Completed monthly PM
Message-ID: <mailman.677.1356282588.4282.mrc-pcs@snf.stanford.edu>

Archived



From eenriquez at snf.stanford.edu  Wed Feb 16 11:05:21 2011
From: eenriquez at snf.stanford.edu (eenriquez at snf.stanford.edu)
Date: Wed, 16 Feb 2011 11:05:21 -0800
Subject: Comment mrc SNF 2010-11-02 16:12:17: Ar sputter reported above was done on 11/1/2010
Message-ID: <mailman.678.1356282588.4282.mrc-pcs@snf.stanford.edu>

Archived



From eenriquez at snf.stanford.edu  Wed Feb 16 11:06:47 2011
From: eenriquez at snf.stanford.edu (eenriquez at snf.stanford.edu)
Date: Wed, 16 Feb 2011 11:06:47 -0800
Subject: Comment mrc SNF 2011-02-16 11:06:46: Completed monthly PM
Message-ID: <mailman.679.1356282588.4282.mrc-pcs@snf.stanford.edu>

Cleaned the chamber and dark space shield.  Installed a clean quartz liner.



From gojh82 at snf.stanford.edu  Thu Feb 24 13:28:15 2011
From: gojh82 at snf.stanford.edu (gojh82 at snf.stanford.edu)
Date: Thu, 24 Feb 2011 13:28:15 -0800
Subject: Shutdown mrc SNF 2011-02-24 13:28:12: 
Message-ID: <mailman.680.1356282588.4282.mrc-pcs@snf.stanford.edu>




From eenriquez at snf.stanford.edu  Thu Feb 24 14:41:02 2011
From: eenriquez at snf.stanford.edu (eenriquez at snf.stanford.edu)
Date: Thu, 24 Feb 2011 14:41:02 -0800
Subject: Shutdown mrc SNF 2011-02-24 13:28:12: 
Message-ID: <mailman.681.1356282588.4282.mrc-pcs@snf.stanford.edu>

Please leave a comment.



From eenriquez at snf.stanford.edu  Thu Feb 24 14:41:20 2011
From: eenriquez at snf.stanford.edu (eenriquez at snf.stanford.edu)
Date: Thu, 24 Feb 2011 14:41:20 -0800
Subject: Shutdown mrc SNF 2011-02-24 14:41:20: RF is not tuning.
Message-ID: <mailman.682.1356282588.4282.mrc-pcs@snf.stanford.edu>




From mcvittie at snf.stanford.edu  Thu Feb 24 16:45:24 2011
From: mcvittie at snf.stanford.edu (mcvittie at snf.stanford.edu)
Date: Thu, 24 Feb 2011 16:45:24 -0800
Subject: Shutdown mrc SNF 2011-02-24 14:41:20: RF is not tuning.
Message-ID: <mailman.683.1356282588.4282.mrc-pcs@snf.stanford.edu>

Found flakes betweem dark shield and bottom of the electrode. The flake was shorting the rf. After cleaning I ran an Ar plasma at 100W and 25 mT. I was able to get zero reflected power on the planel meter.